Summary
The study of the nonlinear behavior of a pre-shaped Micro-ElectroMechanical (MEMS) resonator is numerically investigated. The studied microresonator consists of a clamped-clamped (cc-) beam modeled as an Euler-Bernoulli beam accounting for mid-plane stretching in the in- and out-of-plane vibrations (Y- and Z- directions). The cc-beam is pre-shaped in the XY-plane (in-plane) placed on both edges to mimic springs clamped to their ends, while it is excited in the Z-direction. The tunability of the slope of the nonlinear behavior and the maintenance of the out-of-plane resonance frequencies are observed, which can be beneficial for applications operating at large vibrations.
