Summary
Liquid density measurement using buried channel microresonators reduces the sample amount compared to those using macro-scale ones. In this study, we consider a buried channel microcantilever made of stainless-steel for density measurement use. We propose the utilization of electrostatic force to excite the stainless-steel microcantilever directly to eliminate the dynamic coupling between a microcantilever and its holder. The validity of electrostatic excitation is confirmed through the experiments on exciting stainless-steel microcantilever.
