Summary
This paper examines the design and mathematical modeling of a MEMS sensor leveraging a mode localization based phenomenon. The design suggests a sensitive electrostatically excited clamped-clamped shallow arch micro-beam with an initial curvature designed to replicate one of the three first bending modes of a doubly-clamped beam. The analysis reveals that, through a suitable arrangement of the shallow arch beam’s initial profile, along with proper tuning of its mid-point initial rise and applied DC voltage, a bi-stable behavior can be achieved, resulting in a substantial stroke. Additionally, mode crossing and veering are observed, indicating a coupling between the symmetric and asymmetric modes of vibrations. This shows the potential for employing such a design as a mode-localized MEMS-based sensor.
